A solid-state quantum microscope that controls the wavefunctions of atomic quantum dots in silicon NatureElectron
. These energies are less than that of the sample presented in the manuscript to compensate for a thinner oxide ., Stopping and Range of ions in matter simulations of the implantation profile, for 60 keV , 100 keV and total . The concentration peaks around 40 nm in the silicon substrate, and is largely above the metal/insulator transition at the SiO/Si interface. The lateral range of these implants is less than 20 nm while the diffusion upon flash annealing is less than 25 nm.
, Comparison of the SRIM simulation and and of Rutherford back-scattering measurements of a sample annealed at 660C for 15h. The depth of the SRIM data was offset to match the onset of the RBS signal, as the sacrificial oxide was etched for the RBS samples. The random data correspond to the total amount of Sb, the channeled data correspond to interstitial and unactivated Sb atoms.
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